This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

After the IPS(2) conferences in Cranfield and Linkoeping in 2009 and 2010 the 3rd CIRP International Conference on Industrial Product Service Systems (IPS(2)) 2011 takes place in Braunschweig, Germany. IPS(2) itself is defined as "an integrated industrial product and service offering that delivers value in use". The customers expect comprehensive solutions, which are adapted to their individual needs. IPS(2) offers the possibility to stand out from competition and for long-term customer loyalty. Particularly in times of economic crisis it becomes apparent which producing companies understand to satisfy the needs and requirements of their customers. Especially in this relatively new domain IPS(2) it will be important to keep track of the whole context and to seek cooperation with other research fields and disciplines. The 3rd CIRP International Conference on Industrial Product Service Systems (IPS(2)) 2011 serves as a platform for such collaborations and the discussion of new scientific ideas.

The 18th CIRP International Conference on Life Cycle Engineering (LCE) 2011 continues a long tradition of scientific meetings focusing on the exchange of industrial and academic knowledge and experiences in life cycle assessment, product development, sustainable manufacturing and end-of-life-management. The theme "Glocalized Solutions for Sustainability in Manufacturing" addresses the need for engineers to develop solutions which have the potential to address global challenges by providing products, services and processes taking into account local capabilities and constraints to achieve an economically, socially and environmentally sustainable society in a global perspective. Glocalized Solutions for Sustainability in Manufacturing do not only involve products or services that are changed for a local market by simple substitution or the omitting of functions. Products and services need to be addressed that ensure a high standard of living everywhere. Resources required for manufacturing and use of such products are limited and not evenly distributed in the world. Locally available resources, local capabilities as well as local constraints have to be drivers for product- and process innovations with respect to the entire life cycle. The 18th CIRP International Conference on Life Cycle Engineering (LCE) 2011 serves as a platform for the discussion of the resulting challenges and the collaborative development of new scientific ideas.

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.