This book presents the design and manufacturing of microsystems as
well as necessary key technologies developed within the
Collaborative Research Center 516. The research efforts of this
collaboration are focused on active micro systems which are based
on the electromagnetic actuator principle. The travel of the
investigated actuator systems is on the order of several
millimeters. The total construction size of the actuator is on the
range of several centimeters whereas essential structures being
several micrometers. The methods and the production technologies
that are investigated on the basis of various research models
incorporate the fundamental process chains of microsystems.
General
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