|
Showing 1 - 2 of
2 matches in All Departments
Success in the fabrication of structures at the nanometer length
scale has opened up a new horizon to condensed matter physics: the
study of quantum phenomena in confined boxes, wires, rings, etc. A
new class of electronic devices based on this physics has been
proposed, with the promise of a new functionality for ultrafast
and/or ultradense electronic circuits. Such applications demand
highly sophisticated fabrication techniques, the crucial one being
lithography. Nanolithography contains updated reviews by major
experts on the well established techniques -- electron beam
lithography (EBL), X-ray lithography (XRL), ion beam lithography
(IBL) -- as well as on emergent techniques, such as scanning
tunnelling lithography (STL).
Success in the fabrication of structures at the nanometer length
scale has opened up a new horizon to condensed matter physics: the
study of quantum phenomena in confined boxes, wires, rings, etc. A
new class of electronic devices based on this physics has been
proposed, with the promise of a new functionality for ultrafast
and/or ultradense electronic circuits. Such applications demand
highly sophisticated fabrication techniques, the crucial one being
lithography. Nanolithography contains updated reviews by major
experts on the well established techniques -- electron beam
lithography (EBL), X-ray lithography (XRL), ion beam lithography
(IBL) -- as well as on emergent techniques, such as scanning
tunnelling lithography (STL).
|
|
Email address subscribed successfully.
A activation email has been sent to you.
Please click the link in that email to activate your subscription.