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Books > Science & Mathematics > Physics > States of matter > Condensed matter physics (liquids & solids)

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Nanolithography - A Borderland between STM, EB, IB, and X-Ray Lithographies (Hardcover, 1994 ed.) Loot Price: R5,262
Discovery Miles 52 620
Repayment Terms: R493 pm x 12*
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Nanolithography - A Borderland between STM, EB, IB, and X-Ray Lithographies (Hardcover, 1994 ed.): M. Gentili, Carlo...

Nanolithography - A Borderland between STM, EB, IB, and X-Ray Lithographies (Hardcover, 1994 ed.)

M. Gentili, Carlo Giovannella, Stefano Selci

Series: NATO Science Series E:, 264

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Loot Price R5,262 Discovery Miles 52 620 | Repayment Terms: R493 pm x 12*

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Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL).

General

Imprint: Springer
Country of origin: Netherlands
Series: NATO Science Series E:, 264
Release date: April 1994
First published: 1994
Editors: M. Gentili • Carlo Giovannella • Stefano Selci
Dimensions: 235 x 155 x 14mm (L x W x T)
Format: Hardcover
Pages: 216
Edition: 1994 ed.
ISBN-13: 978-0-7923-2794-3
Categories: Books > Science & Mathematics > Physics > States of matter > Condensed matter physics (liquids & solids)
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LSN: 0-7923-2794-2
Barcode: 9780792327943

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