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Now in its third edition, Fundamentals of Microfabrication and
Nanotechnology continues to provide the most complete MEMS coverage
available. Thoroughly revised and updated the new edition of this
perennial bestseller has been expanded to three volumes, reflecting
the substantial growth of this field. It includes a wealth of
theoretical and practical information on nanotechnology and NEMS
and offers background and comprehensive information on materials,
processes, and manufacturing options. The first volume offers a
rigorous theoretical treatment of micro- and nanosciences, and
includes sections on solid-state physics, quantum mechanics,
crystallography, and fluidics. The second volume presents a very
large set of manufacturing techniques for micro- and
nanofabrication and covers different forms of lithography, material
removal processes, and additive technologies. The third volume
focuses on manufacturing techniques and applications of Bio-MEMS
and Bio-NEMS. Illustrated in color throughout, this seminal work is
a cogent instructional text, providing classroom and self-learners
with worked-out examples and end-of-chapter problems. The author
characterizes and defines major research areas and illustrates them
with examples pulled from the most recent literature and from his
own work.
From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and
Applications details manufacturing techniques applicable to
bionanotechnology. After reviewing MEMS techniques, materials, and
modeling, the author covers nanofabrication, genetically engineered
proteins, artificial cells, nanochemistry, and self-assembly. He
also discusses scaling laws in MEMS and NEMS, actuators, fluidics,
and power and brains in miniature devices. He concludes with
coverage of various MEMS and NEMS applications. Fully illustrated
in color, the text contains end-of-chapter problems, worked
examples, extensive references for further reading, and an
extensive glossary of terms. Details the Nanotechnology, Biology,
and Manufacturing Techniques Applicable to Bionanotechnology Topics
include: Nonlithography manufacturing techniques with
lithography-based methods Nature as an engineering guide and
contrasts top-down and bottom-up approaches Packaging, assembly,
and self-assembly from ICs to DNA and biological cells Selected new
MEMS and NEMS processes and materials, metrology techniques, and
modeling Scaling laws, actuators, power generation, and the
implementation of brains in miniaturizes devices Different
strategies for making micromachines smarter The transition out of
the laboratory and into the marketplace The third volume in
Fundamentals of Microfabrication and Nanotechnology, Third Edition,
Three-Volume Set, the book discusses top-down and bottom-up
manufacturing methods and explains how to use nature as a guide. It
provides a better understanding of how to match different
manufacturing options with a given application that students can
use to identify additional killer MEMS and NEMS applications. Other
volumes in the set include: Solid-State Physics, Fluidics, and
Analytical Techniques in Micro- and Nanotechnology Manufacturing
Techniques for Microfabrication and Nanotechnology
This book provides an introduction to the state-of-the art in
C-MEMS/C-NEMS with an emphasis on lithographically patterned
photo-polymers, carbonized in an inert atmosphere. We can expand
our perspective considerably by learning from the traditional
carbon manufacturing community where researchers deal with a much
wider variety of carbon feed stocks such as coal, coconut shell,
wood, agricultural wastes, and industrial wastes to make all types
of useful carbons. The new concepts are introduced by discussing
carbon nanomaterials synthesis aided with catalysts and chemistry
and detailing the microstructure of the resulting nanocarbons.
Nuclear Magnetic Resonance (NMR) and Electron Spin Resonance (ESR)
spectroscopies are well-known characterization techniques that
reveal the molecular details of a sample non-invasively. The
authors discuss how NMR can provide useful information on the
microstructure of carbon and its surface properties and explain how
C-MEMS/C-NEMS technology can be explored for building improved NMR
microdevices. The authors highlight the manipulation of fluids and
particles by dielectrophoresis and the use of carbon electrodes for
dielectrophoresis in Lab-on-a-Chip. The use of these electrodes in
sample preparation through electrical polarization of a sample for
identification, manipulation, and lysis of bioparticles is also
discussed and they introduce a new generation of neural prosthetics
based on glassy carbon micromachined electrode arrays. The tuning
of the electrical, electrochemical and mechanical properties of
these patternable electrodes for applications in bio-electrical
signal recording and stimulation, and results from in-vivo testing
of these glassy carbon microelectrode arrays is reported,
demonstrating a quantifiable superior performance compared to metal
electrodes.
Providing a clear theoretical understanding of MEMS and NEMS,
Solid-State Physics, Fluidics, and Analytical Techniques in Micro-
and Nanotechnology focuses on nanotechnology and the science behind
it, including solid-state physics. It provides a clear
understanding of the electronic, mechanical, and optical properties
of solids relied on in integrated circuits (ICs), MEMS, and NEMS.
After exploring the rise of Si, MEMS, and NEMS in a historical
context, the text discusses crystallography, quantum mechanics, the
band theory of solids, and the silicon single crystal. It concludes
with coverage of photonics, the quantum hall effect, and
superconductivity. Fully illustrated in color, the text offers
end-of-chapter problems, worked examples, extensive references, and
a comprehensive glossary of terms. Topics include: Crystallography
and the crystalline materials used in many semiconductor devices
Quantum mechanics, the band theory of solids, and the relevance of
quantum mechanics in the context of ICs and NEMS Single crystal Si
properties that conspire to make Si so important Optical properties
of bulk 3D metals, insulators, and semiconductors Effects of
electron and photon confinement in lower dimensional structures How
evanescent fields on metal surfaces enable the guiding of light
below the diffraction limit in plasmonics Metamaterials and how
they could make for perfect lenses, changing the photonic field
forever Fluidic propulsion mechanisms and the influence of
miniaturization on fluid behavior Electromechanical and optical
analytical processes in miniaturized components and systems The
first volume in Fundamentals of Microfabrication and
Nanotechnology, Third Edition, Three-Volume Set, the book presents
the electronic, mechanical, and optical properties of solids that
are used in integrated circuits, MEMS, and NEMS and covers quantum
mechanics, electrochemistry, fluidics, and photonics. It lays the
foundation for a qualitative and quantitative theoretical
understanding of MEMS and NEMS.
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