Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms. Details the Nanotechnology, Biology, and Manufacturing Techniques Applicable to Bionanotechnology Topics include: Nonlithography manufacturing techniques with lithography-based methods Nature as an engineering guide and contrasts top-down and bottom-up approaches Packaging, assembly, and self-assembly from ICs to DNA and biological cells Selected new MEMS and NEMS processes and materials, metrology techniques, and modeling Scaling laws, actuators, power generation, and the implementation of brains in miniaturizes devices Different strategies for making micromachines smarter The transition out of the laboratory and into the marketplace The third volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book discusses top-down and bottom-up manufacturing methods and explains how to use nature as a guide. It provides a better understanding of how to match different manufacturing options with a given application that students can use to identify additional killer MEMS and NEMS applications. Other volumes in the set include: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology Manufacturing Techniques for Microfabrication and Nanotechnology

This book provides an introduction to the state-of-the art in C-MEMS/C-NEMS with an emphasis on lithographically patterned photo-polymers, carbonized in an inert atmosphere. We can expand our perspective considerably by learning from the traditional carbon manufacturing community where researchers deal with a much wider variety of carbon feed stocks such as coal, coconut shell, wood, agricultural wastes, and industrial wastes to make all types of useful carbons. The new concepts are introduced by discussing carbon nanomaterials synthesis aided with catalysts and chemistry and detailing the microstructure of the resulting nanocarbons.

Nuclear Magnetic Resonance (NMR) and Electron Spin Resonance (ESR) spectroscopies are well-known characterization techniques that reveal the molecular details of a sample non-invasively. The authors discuss how NMR can provide useful information on the microstructure of carbon and its surface properties and explain how C-MEMS/C-NEMS technology can be explored for building improved NMR microdevices. The authors highlight the manipulation of fluids and particles by dielectrophoresis and the use of carbon electrodes for dielectrophoresis in Lab-on-a-Chip. The use of these electrodes in sample preparation through electrical polarization of a sample for identification, manipulation, and lysis of bioparticles is also discussed and they introduce a new generation of neural prosthetics based on glassy carbon micromachined electrode arrays. The tuning of the electrical, electrochemical and mechanical properties of these patternable electrodes for applications in bio-electrical signal recording and stimulation, and results from in-vivo testing of these glassy carbon microelectrode arrays is reported, demonstrating a quantifiable superior performance compared to metal electrodes.

Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. Fully illustrated in color, the text offers end-of-chapter problems, worked examples, extensive references, and a comprehensive glossary of terms. Topics include: Crystallography and the crystalline materials used in many semiconductor devices Quantum mechanics, the band theory of solids, and the relevance of quantum mechanics in the context of ICs and NEMS Single crystal Si properties that conspire to make Si so important Optical properties of bulk 3D metals, insulators, and semiconductors Effects of electron and photon confinement in lower dimensional structures How evanescent fields on metal surfaces enable the guiding of light below the diffraction limit in plasmonics Metamaterials and how they could make for perfect lenses, changing the photonic field forever Fluidic propulsion mechanisms and the influence of miniaturization on fluid behavior Electromechanical and optical analytical processes in miniaturized components and systems The first volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book presents the electronic, mechanical, and optical properties of solids that are used in integrated circuits, MEMS, and NEMS and covers quantum mechanics, electrochemistry, fluidics, and photonics. It lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS.