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Physics of Thin Films is one of the longest running continuing
series in thin film science, consisting of twenty volumes since
1963. The series contains quality studies of the properties of
various thinfilms materials and systems.
In order to be able to reflect the development of today's science
and to cover all modern aspects of thin films, the series, starting
with Volume 20, has moved beyond the basic physics of thin films.
It now addresses the most important aspects of both inorganic and
organic thin films, in both their theoretical as well as
technological aspects. Therefore, in order to reflect the modern
technology-oriented problems, the title has been slightly modified
from Physics of Thin Films to Thin Films.
Key Features
* Discusses the latest research about structure, physics, and
infrared photoemissive behavior of heavily doped silicon
homojunctions and Ge and GaAs-based alloy junctions
* Reviews the current status of SiGe/Si quantum wells for infrared
detection
* Discusses key developments in the growing research on
quantum-well infrared photodetectors (QWIPs)
* Reviews Chois development of a family of novel three-terminal,
multi-quantum well devices designed to improve high-temperature IR
detectivity at long wavelengths
* Describes recent studies aimed at using multi-quantum well
structures to achieve higher performance in solar cell devices
based on materials systems
Physics of Thin Films is one of the longest running continuing
series in thin film science, consisting of 25 volumes since 1963.
The series contains quality studies of the properties of various
thin films materials and systems.In order to be able to reflect the
development of today's science and to cover all modern aspects of
thin films, the series, starting with Volume 20, has moved beyond
the basic physics of thin films. It now addresses the most
important aspects of both inorganic and organic thin films, in both
their theoretical as well as technological aspects. Therefore, in
order to reflect the modern technology-oriented problems, the title
has been slightly modified from Physics of Thin Films to Thin
Films.
Significant progress has occurred during the last few years in
device technologies and these are surveyed in this new volume.
Included are Si/(Si-Ge) heterojunctions for high-speed integrated
circuits, Schottky-barrier arrays in Si and Si-Ge alloys for
infrared imaging, III-V quantum-well detector structures operated
in the heterodyne mode for high-data-rate communications, and III-V
heterostructures and quantum-wells for infrared emissions.
This latest volume of the well-known Physics of Thin Films Series
includes four chapters that discuss high-density plasma sources for
materials processing, electron cyclotron resonance and its uses,
unbalancedmagnetron sputtering, and particle formation in thin film
processing plasma.
Key Features
* Chapter One develops a unified framework from which all
"high-efficiency" sources may be viewed and compared; outlines key
elements of source design affecting processing results; and
highlights areas where additional research and development are
needed
* Chapter Two reviews and analyzes the main types of electron
cyclotron resonance (ECR) plasma sources suitable for ECR PACVD of
thin films, mainly ECR sources using magnet coils
* Chapter Three examines the benefits and limitations of the new
technique, unbalanced magnetron sputtering (UBM), along with the
motivation for its development, the basic principles of its
operation and commercial applications, and some speculations
regarding the future of UBM technology
* Chapter Four describes general phenomena observed in connection
with particle formation in thin film processing plasmas; discusses
particles in PECVD plasmas, sputtering plasmas, and RIE plasmas;
presents an overview of the theoretical modeling of various aspects
of particles in processing plasmas; examines issues of equipment
design affecting particle formation; and concludes with remarks
about the implications of this work for the control of
process-induced particle contamination.
The highly industrialized world we live in depends for its survival
and further growth on advanced electronic technologies which place
a premium on rapidly improved performance versus size, weight, and
cost. Small computers, high-definition TV, digital camcorders,
flat-panel displays, and robotic systems are but a few examples of
miniatured device technologies which are of critical importance to
emerging societal, industrial, defense, and space needs. All of
these technologies depend sensitively on the availability of
miniature thin film components in array and/or integrated formats.
This book provides that first multi-topical coverage of the
semiconductor, optical, superconductor, magnetic, and ferroelectric
devices and technologies responding to these needs.
This book comprises five topical volumes edited by world
authorities in their fields, i.e. semiconductor junction devices,
semiconductor optics, superconducting film devices, magnetic film
devices, and ferroelectric film devices. Well-known experts were
invited to cover recent progress in aspects ranging from deposition
and fabrication to device modeling, measurements, and new
cutting-edge design approached for improved performance. This
multitopic approach effectively demonstrates the broad-based and
pervasive character of thin film techniques that impact and control
a vast array of device functions that are critical to developments
in computer technology, communications, television, defense and
space systems, and industrial and consumer products. Readers are
provided with both broad critical overviews and research level
analysis and technical details.
Key Features
* A comprehensive discussion of the most promising andcompletely
developed of thin film devices which impact the entire field of
high-tech components and systems for commercial, defense and space
applications
* Edited and written by internationally known, authoritative
experts and innovators, familiar with all aspects of research and
development in their fields and with current and potential
applications
* Presents the reader with informed assessments of all candidate
solid state film devices now being optimized for advanced
application, e.g., in flat panel displays, solar energy conversion,
high-speed and power components, radar technology, infrared
imaging, advanced computers, laser sources, and numerous other
arenas
* Provides a well-balanced coverage of materials growth and
optimization, thin-film device modelling, device fabrication and
characterization, and future development directions;These inputs
are critically important to both educators, designers, device
technologists and manufacturers, and to system engineers
* Furnishes useful insights on processing compatibility, materials
and film device stability, interface engineering, cryogenic
requirements and operation, lithography and micro-machining, and
integrability for sub-systems
* Provides a broad-based view of alternative and/or complimentary
film device technologies in a single, well-referenced source
* Ensures complete and detailed overview of solid-state device
topics, comprehensive bibliographical information, and expert
guidance in advanced and sophisticated areas of device technology
and potental applications
* Furnishes invaluable insights on competitive state-of-the-art
thin film semiconductor, photonics, superconductor, magnetic and
ferroelectrictechnologies, processing and compatibility, device
options, performance potential and prospects for essentially all
solid-state film components
* An essential information source and primer for educators,
researchers, engineers and technology leaders supplying a wealth of
background theoretical and experimental details, as well as
guidance for further advanced research and development, thesis
topics and high-tech product design
* Identifies key processing, fabrication, design, integration,
compatibility problems and solutions involved in successful
development of high-performance and stable device and sub-system
architectures
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