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This book discusses physical design and mask synthesis of directed
self-assembly lithography (DSAL). It covers the basic background of
DSAL technology, physical design optimizations such as placement
and redundant via insertion, and DSAL mask synthesis as well as its
verification. Directed self-assembly lithography (DSAL) is a highly
promising patterning solution in sub-7nm technology.
This book discusses physical design and mask synthesis of directed
self-assembly lithography (DSAL). It covers the basic background of
DSAL technology, physical design optimizations such as placement
and redundant via insertion, and DSAL mask synthesis as well as its
verification. Directed self-assembly lithography (DSAL) is a highly
promising patterning solution in sub-7nm technology.
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