This book provides an introduction to robot-based nanohandling. It presents work on the development of a versatile microrobot-based nanohandling robot station inside a scanning electron microscope (SEM). Those unfamiliar with the subject will find the text, which is complemented throughout by the extensive use of illustrations, clear and simple to understand. The author has published two books and numerous papers in the field, and holds more than 50 patents.

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

Die Mikrosystemtechnik (MST) zielt darauf ab, verschiedenste Funktionen auf kleinstem Raum zu realisieren. Ein Mikrosystem besteht in der Regel aus verschiedenartigen, z.B. mechanischen, optischen oder elektronischen Komponenten, die sehr genau zusammengefugt werden mussen. Markante Beispiele sind Abtastkopfe fur CD-Spieler, mikrooptische und -optoelektronische Bausteine fur Kommunikationssysteme oder Mikrosensoren fur die Automobil-, Umwelt-, Bio- oder Sicherheitstechnik. Die flexible roboterbasierte Mikromontage nebst speziellen Montageplanungs- und Steuerungstechniken wird heute als die Schlusseltechnologie zur industriellen Beherrschung der MST angesehen. Dieses Lehrbuch liefert zum ersten Mal eine systematisierte Gesamtsicht auf die Mikromontage- und Mikroroboterproblematik.
Die interessierten Einsteiger konnen problemlos den grossten Teil des prasentierten Stoffes verarbeiten, denn die notwendigen technischen Erklarungen wurden nach Moglichkeit ohne grosseren mathematischen "Tiefgang" gehalten.
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