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PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing, Volume 26 (Hardcover): Stephen M. Rossnagel,... PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing, Volume 26 (Hardcover)
Stephen M. Rossnagel, Ronald Powell, Abraham Ulman
R3,338 Discovery Miles 33 380
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The progress in device technologies are surveyed in this volume. Included are Si/ (Si-Ge) heterojunctions for high-speed integrated circuits. Schottky-barrier arrays in Si and Si-Ge alloys for infrared imaging, III-V quantum-well detector structures operated in the heterodyne mode for high-data-rate communications, and III-V heterostructures and quantum-wells for infrared transmissions.

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