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Glow Discharge Processes - Sputtering and Plasma Etching (Hardcover) Loot Price: R5,943
Discovery Miles 59 430
Repayment Terms: R557 pm x 12*
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Glow Discharge Processes - Sputtering and Plasma Etching (Hardcover): B. Chapman

Glow Discharge Processes - Sputtering and Plasma Etching (Hardcover)

B. Chapman

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Loot Price R5,943 Discovery Miles 59 430 | Repayment Terms: R557 pm x 12*

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Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications—practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

General

Imprint: John Wiley & Sons
Country of origin: United States
Release date: November 1980
First published: September 1980
Authors: B. Chapman
Dimensions: 234 x 156 x 24mm (L x W x T)
Format: Hardcover
Pages: 432
ISBN-13: 978-0-471-07828-9
Categories: Books > Science & Mathematics > Physics > Electricity, magnetism & electromagnetism
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LSN: 0-471-07828-X
Barcode: 9780471078289

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