As the deep-ultraviolet (DUV) laser technology continues to
mature, an increasing number of industrial and manufacturing
applications are emerging. For example, the new generation of
semiconductor inspection systems is being pushed to image at
increasingly shorter DUV wavelengths to facilitate inspection of
deep sub-micron features in integrated circuits. DUV-sensitive
charge-coupled device (CCD) cameras are in demand for these
applications. Although CCD cameras that are responsive at DUV
wavelengths are now available, their long-term stability is still a
major concern. This book describes the degradation mechanisms and
long-term performance of CCDs in the DUV, along with new results of
device performance at these wavelengths.
General
Is the information for this product incomplete, wrong or inappropriate?
Let us know about it.
Does this product have an incorrect or missing image?
Send us a new image.
Is this product missing categories?
Add more categories.
Review This Product
No reviews yet - be the first to create one!
Welcome to Loot.co.za!
Sign in / Register |Wishlists & Gift Vouchers |Help | Advanced search
