Optical Microscanners and Microspectrometers using Thermal
Bimorph Actuators shows how to design and fabricate optical
microsystems using innovative technologies and and original
architectures. A barcode scanner, laser projection mirror and a
microspectrometer are explained in detail, starting from the system
conception, discussing simulations, choice of cleanroom
technologies, design, fabrication, device test, packaging all the
way to the system assembly.
An advanced microscanning device capable of one- and
two-dimensional scanning can be integrated in a compact barcode
scanning system composed of a laser diode and adapted optics. The
original design of the microscanner combines efficiently the
miniaturized thermal mechanical actuator and the reflecting mirror,
providing a one-dimensional scanning or an unique combination of
two movements, depending on the geometry. The simplicity of the
device makes it a competitive component.
The authors rethink the design of a miniaturized optical device
and find a compact solution for a microspectrometer, based on a
tunable filter and a single pixel detector. A porous silicon
technology combines efficiently the optical filter function with a
thermal mechanical actuator on chip. The methodology for design and
process calibration are discussed in detail. The device is the core
component of an infrared gas spectrometer.
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