A Guide to Hands-on MEMS Design and Prototyping (Hardcover)

Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.

General

Imprint:	Cambridge UniversityPress
Country of origin:	United Kingdom
Release date:	August 2011
First published:	August 2011
Authors:	Joel A. Kubby
Dimensions:	235 x 158 x 14mm (L x W x T)
Format:	Hardcover
Pages:	178
ISBN-13:	978-0-521-88925-4
Categories:	Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Microwave technology Books > Professional & Technical > Electronics & communications engineering > Communications engineering / telecommunications > WAP (wireless) technology
LSN:	0-521-88925-1
Barcode:	9780521889254

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