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Particles in Gases and Liquids 2 - Detection, Characterization, and Control (Hardcover, 2nd Revised edition)
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Particles in Gases and Liquids 2 - Detection, Characterization, and Control (Hardcover, 2nd Revised edition)
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This book chronicles the proceedings of the Second Symposium on
Particles in Gases and Liquids: Detection, Characterization and
Control held as a part of the 20th Annual Fine Particle Society
meeting in Boston, August 21-25, 1989. As this second symposium was
as successful as the prior one, so we have decided to hold symposia
on this topic on a regular (biennial) basis and the third symposium
in this series is scheduled to be held at the 22nd Annual Meeting
of the Fine Particle Society in San Jose, California, July
29-August 2, 1991. l As pointed out in the Preface to the prior
volume in this series that recently there has been tremendous
concern about yield losses due to unwanted particles, and these
unwelcome particles can originate from a legion of sources,
including process gases and liquids. Also all signals indicate that
in the future manufacture of sophisticated and sensitive
microelectronic components (with shrinking dimensions) and other
precision parts, the need for detection, characterization, analysis
and control of smaller and smaller particles will be more
intensified.
General
Imprint: |
Kluwer Academic / Plenum Publishers
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Country of origin: |
United States |
Release date: |
March 1991 |
First published: |
1990 |
Editors: |
K.L. Mittal
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Dimensions: |
234 x 156 x 25mm (L x W x T) |
Format: |
Hardcover
|
Pages: |
408 |
Edition: |
2nd Revised edition |
ISBN-13: |
978-0-306-43809-7 |
Categories: |
Books >
Science & Mathematics >
Chemistry >
Physical chemistry >
General
|
LSN: |
0-306-43809-7 |
Barcode: |
9780306438097 |
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