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Silicon Micromachining (Paperback, Revised)
Loot Price: R1,907
Discovery Miles 19 070
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Silicon Micromachining (Paperback, Revised)
Series: Cambridge Studies in Semiconductor Physics and Microelectronic Engineering
Expected to ship within 12 - 17 working days
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Total price: R1,927
Discovery Miles: 19 270
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This comprehensive book provides an overview of the key techniques
used in the fabrication of micron-scale structures in silicon.
Recent advances in these techniques have made it possible to create
a new generation of microsystem devices, such as microsensors,
accelerometers, micropumps, and miniature robots. The authors
underpin the discussion of each technique with a brief review of
the fundamental physical and chemical principles involved. They pay
particular attention to methods such as isotropic and anisotropic
wet chemical etching, wafer bonding, reactive ion etching, and
surface micromachining. There is a special section on bulk
micromachining, and the authors also discuss release mechanisms for
movable microstructures. The book is a blend of detailed
experimental and theoretical material, and will be of great
interest to graduate students and researchers in electrical
engineering and materials science whose work involves the study of
micro-electromechanical systems (MEMS).
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