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Micro Process Engineering - Fundamentals, Devices, Fabrication and Applications (Paperback)
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Micro Process Engineering - Fundamentals, Devices, Fabrication and Applications (Paperback)
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This edition of 'Micro Process Engineering' was originally
published in the successful series 'Advanced Micro &
Nanosystems'. Authors from leading industrial players and research
institutions present a concise and didactical introduction to Micro
Process Engineering, the combination of microtechnology and process
engineering into a most promising and powerful tool for
revolutionizing chemical processes and industrial mass production
of bulk materials, fine chemicals, pharmaceuticals and many other
products. The book takes the readers from the fundamentals of
engineering methods, transport processes, and fluid dynamics to
device conception, simulation and modelling, control interfaces and
issues of modularity and compatibility. Fabrication strategies and
techniques are examined next, focused on the fabrication of
suitable microcomponents from various materials such as metals,
polymers, silicon, ceramics and glass. The book concludes with
actual applications and operational aspects of micro process
systems, giving broad coverage to industrial efforts in America,
Europe and Asia as well as laboratory equipment and education.
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