Modelling of Microfabrication Systems (Hardcover, 2003 ed.)

This book addresses modelling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illustrated, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.

General

Imprint:	Springer-Verlag
Country of origin:	Germany
Series:	Microtechnology and MEMS
Release date:	June 2003
First published:	2003
Authors:	Raja Nassar • Weizhong Dai
Dimensions:	235 x 155 x 17mm (L x W x T)
Format:	Hardcover
Pages:	270
Edition:	2003 ed.
ISBN-13:	978-3-540-00252-9
Categories:	Books > Reference & Interdisciplinary > Encyclopaedias & reference works > General Books > Science & Mathematics > Mathematics > General Books > Professional & Technical > Technology: general issues > Nanotechnology
LSN:	3-540-00252-9
Barcode:	9783540002529

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