Rapid Thermal Processing - Science and Technology (Hardcover)

This text discusses rapid thermal processing (RTP), an essential manufacturing technology for single-wafer processing in highly controlled environments. The book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The text also provides information on the suitability of RTP for thin film deposition, junction formation, silicides, epitaxy and "in situ" processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches should also make this book useful for supplemental information on silicon processing, VLSI processing and integrated circuit engineering.;"Rapid Thermal Processing" should be of interest to process engineers working in microelectronic research and development; production and manufacturing engineers working with silicon-integrated circuits; researchers working in semiconductor processing; graduate students and researchers in electronics, electrical engineering and materials science.

General

Imprint:	Academic Press Inc
Country of origin:	United States
Release date:	June 1993
First published:	April 1993
Editors:	Richard B. Fair
Dimensions:	229 x 152 x 25mm (L x W x T)
Format:	Hardcover
Pages:	430
ISBN-13:	978-0-12-247690-7
Categories:	Books > Professional & Technical > Mechanical engineering & materials > Materials science > Engineering thermodynamics Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Circuits & components
LSN:	0-12-247690-5
Barcode:	9780122476907

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