Design and Development of MEMS based Guided Beam Type Piezoelectric Energy Harvester (Paperback, 1st ed. 2021)

This book presents device design, layout design, FEM analysis, device fabrication, and packaging and testing of MEMS-based piezoelectric vibration energy harvesters. It serves as a complete guide from design, FEM, and fabrication to characterization. Each chapter of this volume illustrates key insight technologies through images. The book showcases different technologies for energy harvesting and the importance of energy harvesting in wireless sensor networks. The design, simulation, and comparison of three types of structures - single beam cantilever structure, cantilever array structure, and guided beam structure have also been reported in one of the chapters. In this volume, an elaborate characterization of two-beam and four-beam fabricated devices has been carried out. This characterization includes structural, material, morphological, topological, dynamic, and electrical characterization of the device. The volume is very concise, easy to understand, and contains colored images to understand the details of each process.

General

Imprint:	Springer Verlag, Singapore
Country of origin:	Singapore
Series:	Energy Systems in Electrical Engineering
Release date:	April 2022
First published:	2021
Authors:	Shanky Saxena • Ritu Sharma • B. D. Pant
Dimensions:	235 x 155mm (L x W)
Format:	Paperback
Pages:	190
Edition:	1st ed. 2021
ISBN-13:	978-981-16-0608-3
Categories:	Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Circuits & components Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Other manufacturing technologies > Precision instruments manufacture > General
LSN:	981-16-0608-0
Barcode:	9789811606083

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