The SISDEP 93 conference proceedings present outstanding research
and development results in the area of numerical process and device
simulation. The miniaturization of today's semiconductor devices,
the usage of new materials and advanced process steps in the
development of new semiconductor technologies suggests the design
of new computer programs. This trend towards more complex
structures and increasingly sophisticated processes demands
advanced simulators, such as fully three-dimensional tools for
almost arbitrarily complicated geometries. With the increasing need
for better models and improved understanding of physical effects,
these proceedings support the simulation community and the process-
and device engineers who need reliable numerical simulation tools
for characterization, prediction, and development. This book covers
the following topics: process simulation and equipment modeling,
device modeling and simulation of complex structures, device
simulation and parameter extraction for circuit models, integration
of process, device and circuit simulation, practical applications
of simulation, algorithms and software.
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