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Polycrystalline Silicon for Integrated Circuit Applications (Hardcover, 1988 ed.)
Loot Price: R4,675
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Polycrystalline Silicon for Integrated Circuit Applications (Hardcover, 1988 ed.)
Series: The Springer International Series in Engineering and Computer Science, 45
Expected to ship within 10 - 15 working days
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Recent years have seen silicon integrated circuits enter into an
increasing number of technical and consumer applications, until
they now affect everyday life, as well as technical areas.
Polycrystalline silicon has been an important component of silicon
technology for nearly two decades, being used first in MOS
integrated circuits and now becoming pervasive in bipolar circuits,
as well. During this time a great deal of informa tion has been
published about polysilicon. A wide range of deposition conditions
has been used to form films exhibiting markedly different
properties. Seemingly contradictory results can often be explained
by considering the details of the structure formed. This monograph
is an attempt to synthesize much of the available knowledge about
polysilicon. It represents an effort to interrelate the deposition,
properties, and applications of polysilicon so that it can be used
most effectively to enhance device and integrated-circuit perfor
mance. As device performance improves, however, some of the proper
ties of polysilicon are beginning to restrict the overall
performance of integrated circuits, and the basic limitations of
the properties of polysili con also need to be better understood to
minimize potential degradation of circuit behavior."
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