This book presents the fundamentals of noise and its effect on the
minimum detectable signal of mems transducers. The text will bring
together the fundamental noise physics, device noise, and circuit
noise with applications to MEMS transducers. Cases studies will
compare noise floors of mems sensors employing different
transduction mechanisms and illustrate design tradeoffs and scaling
effects with miniaturization. The goal is to provide the reader
with a basic understanding of the effect of device and circuit
noise on the performance of mems transducers.
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