This book presents the method of ion beam modification of solids in
realization, theory and applications in a comprehensive way. It
provides a review of the physical basics of ion-solid interaction
and on ion-beam induced structural modifications of solids. Ion
beams are widely used to modify the physical properties of
materials. A complete theory of ion stopping in matter and the
calculation of the energy loss due to nuclear and electronic
interactions are presented including the effect of ion channeling.
To explain structural modifications due to high electronic
excitations, different concepts are presented with special emphasis
on the thermal spike model. Furthermore, general concepts of damage
evolution as a function of ion mass, ion fluence, ion flux and
temperature are described in detail and their limits and
applicability are discussed. The effect of nuclear and electronic
energy loss on structural modifications of solids such as damage
formation, phase transitions and amorphization is reviewed for
insulators and semiconductors. Finally some selected applications
of ion beams are given.
General
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