This resulting volume details the state-of-the-art regarding
numerous aspects of advanced micro technologies with respect to a
wide range of materials, and the development of new production
platforms for micro systems-based products. The contributions from
leading authors from universities, independent research and
corporate organizations provide an invaluable overview of this
rapidly moving subject and an insight into key research and
development areas. This comprehensive collection of indexed and
peer-reviewed articles is also contained on a CD with search
functionality.
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