Strain Effect in Semiconductors: Theory and Device Applications
presents the fundamentals and applications of strain in
semiconductors and semiconductor devices that is relevant for
strain-enhanced advanced CMOS technology and strain-based
piezoresistive MEMS transducers. Discusses relevant applications of
strain while also focusing on the fundamental physics pertaining to
bulk, planar, and scaled nano-devices. Hence, this book is relevant
for current strained Si logic technology as well as for
understanding the physics and scaling for future strained
nano-scale devices.
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