The Handbook of Thin Film Process Technology is a practical
handbook for the thin film scientist, engineer and technician. This
handbook is regularly updated with new material, and this volume is
a special issue on reactive sputtering which will be of interest to
a wide range of industrial and academic researchers in addition to
owners of the main Handbook. Some recent developments in the
reactive sputtering field are covered, including unbalanced
magnetron sputtering and pulsed reactive sputtering. The articles
contain a wealth of practical information relating to applications,
practice and manufacturing techniques.
General
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