Handbook of Thin Film Process Technology - 98/1 Reactive Sputtering (Hardcover)

The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and academic researchers in addition to owners of the main Handbook. Some recent developments in the reactive sputtering field are covered, including unbalanced magnetron sputtering and pulsed reactive sputtering. The articles contain a wealth of practical information relating to applications, practice and manufacturing techniques.

General

Imprint:	Crc Press
Country of origin:	United Kingdom
Release date:	November 2017
First published:	2018
Authors:	David A Glocker
Dimensions:	297 x 210mm (L x W)
Format:	Hardcover
Pages:	90
ISBN-13:	978-1-315-89368-6
Categories:	Books > Science & Mathematics > Physics > States of matter > Condensed matter physics (liquids & solids) Books > Science & Mathematics > Biology, life sciences > Life sciences: general issues > General
LSN:	1-315-89368-1
Barcode:	9781315893686

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