Advances in Rapid Thermal and Integrated Processing (Hardcover, 1996 ed.)

Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.

General

Imprint:	Springer
Country of origin:	Netherlands
Series:	NATO Science Series E:, 318
Release date:	2001
First published:	1996
Editors:	F. Roozeboom
Dimensions:	235 x 155 x 31mm (L x W x T)
Format:	Hardcover
Pages:	566
Edition:	1996 ed.
ISBN-13:	978-0-7923-4011-9
Categories:	Books > Science & Mathematics > Physics > States of matter > Condensed matter physics (liquids & solids) Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > Semi-conductors & super-conductors
LSN:	0-7923-4011-6
Barcode:	9780792340119

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