Toward Inertial-Navigation-on-Chip - The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes (Paperback, 1st ed. 2019)

This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly, advanced designs and micro/nano-fabrication methods developed in this work demonstrate valuable applications to a wide range of MEMS/NEMS devices. In particular, the HARPSS+ process platform established in this thesis features a novel slanted nano-gap transducer, which enabled the first wafer-level-packaged single-chip IMU prototype with co-fabricated high-frequency resonant triaxial gyroscopes and high-bandwidth triaxial micro-gravity accelerometers. This prototype demonstrates performance amongst the highest to date, with unmatched robustness and potential for flexible substrate integration and ultra-low-power operation. This thesis shows a path toward future low-power IMU-based applications including wearable inertial sensors, health informatics, and personal inertial navigation.

General

Imprint:	Springer Nature Switzerland AG
Country of origin:	Switzerland
Series:	Springer Theses
Release date:	September 2020
First published:	2019
Authors:	Haoran Wen
Dimensions:	235 x 155mm (L x W)
Format:	Paperback
Pages:	127
Edition:	1st ed. 2019
ISBN-13:	978-3-03-025472-8
Categories:	Books > Science & Mathematics > Science: general issues > Scientific standards Books > Professional & Technical > Technology: general issues > Nanotechnology Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > General Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Other manufacturing technologies > Precision instruments manufacture > General Books > Professional & Technical > Mechanical engineering & materials > Materials science > Mechanics of solids > Dynamics & vibration
LSN:	3-03-025472-0
Barcode:	9783030254728

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