In addition to introducing the basics of plasma physics,
Nonthermal Plasma Chemistry and Physics is a comprehensive
presentation of recent developments in the rapidly growing field of
nonthermal plasma chemistry. The book offers a detailed discussion
of the fundamentals of plasma chemical reactions and modeling,
nonthermal plasma sources, relevant diagnostic techniques, and
selected applications.
Elucidating interconnections and trends, the book focuses on
basic principles and illustrations across a broad field of
applications. Expert contributors address environmental aspects of
plasma chemistry. The book also includes selected plasma conditions
and specific applications in volume plasma chemistry and treatment
of material surfaces such as plasma etching in microelectronics,
chemical modification of polymer surfaces and deposition of
functional thin films. Designed for students of plasma physics,
Nonthermal Plasma Chemistry and Physics is a concise resource also
for specialists in this and related fields of research.
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