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Particles in Gases and Liquids 3 - Detection, Characterization, and Control (Hardcover, 1993 ed.)
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Particles in Gases and Liquids 3 - Detection, Characterization, and Control (Hardcover, 1993 ed.)
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This book documents the proceedings of the Third Symposium on
Particles in Gases and Liquids: Detection, Characterization and
Control held as a part of the 22nd Annual Meeting of the Fine
Particle Society in San Jose, California, July 29-August 2, 1991.
This series of symposia was initiated in 1987 in light of the
growing importance to eliminate particles from process gases and
liquids. As pointed out in the Preface to antecedent volumes in
this series that particles in process gases and liquids could cause
significant yield losses in precision manufacturing and
concomitantly there has been heightened interest in understanding
the behavior of particles in gases and liquids and devising ways to
eliminate, or at least reduce substantially, these particles. The
concern about particles in gases and liquids has been there for
qui.te some time in the microelectronics arena, but there are other
areas also where particles are of significant concern, e.g. in
operation theatres in hospitals, food and beverage industry, and
pharmaceutical manufacturing. This symposium basically had the same
objectives as its predecessors, but to provide an update on the
R&D activity taking place in the arena of particle detection,
characterization and control. The printed program comprised a total
of 28 papers dealing with variegated aspects of particles in gases
and liquids. There were brisk and lively discussions and the
attendees offered many positive comments, which goes to show that
it was a well-received and needed symposium.
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