Analysis of Microelectronic Materials & Devices (Paperback, New Ed)

This book presents, for the first time, a comprehensive survey of analytical techniques currently used in support of all stages of microelectronic materials and device processing. The diversity of topics covered in this book has been achieved by bringing together an international field of authors contributing specialized individual chapters. This has ensured that each technique is discussed in detail giving in-depth treatments of the subject matter. A particularly helpful feature in this book is the concise technical summary given at the end of each section. Four major areas are considered in this volume:

• Bulk analysis of microelectronic materials

• Analysis of surfaces, interfaces and thin films

• Structure analysis on an atomic scale

• Characterization of physical, electrical and topographic features

Complete with over 400 illustrations, this volume is an indispensible guide to analytical support for the microelectronic industry.

General

Imprint:	John Wiley & Sons
Country of origin:	United States
Release date:	March 1994
Authors:	M. Grasserbauer
Dimensions:	229 x 156 x 51mm (L x W x T)
Format:	Paperback
Pages:	980
Edition:	New Ed
ISBN-13:	978-0-471-95013-4
Categories:	Books > Science & Mathematics > Chemistry > Analytical chemistry > General Books > Professional & Technical > Mechanical engineering & materials > Materials science > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Circuits & components
LSN:	0-471-95013-0
Barcode:	9780471950134

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