Directed Self-assembly of Block Co-polymers for Nano-manufacturing (Hardcover)

The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology. Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new processing methods for DSA. Part 2 then goes on to outline the key modelling and characterization principles of DSA, reviewing templates and patterning using topographical and chemically modified surfaces, line edge roughness and dimensional control, x-ray scattering for characterization, and nanoscale driven assembly. Finally, Part 3 discusses application areas and related issues for DSA in nano-manufacturing, including for basic logic circuit design, the inverse DSA problem, design decomposition and the modelling and analysis of large scale, template self-assembly manufacturing techniques.

General

Imprint:	Woodhead Publishing Ltd
Country of origin:	United Kingdom
Series:	Woodhead Publishing Series in Electronic and Optical Materials
Release date:	August 2015
Editors:	Roel Gronheid • Paul Nealey
Dimensions:	229 x 152 x 23mm (L x W x T)
Format:	Hardcover
Pages:	328
ISBN-13:	978-0-08-100250-6
Categories:	Books > Professional & Technical > Technology: general issues > Nanotechnology Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Industrial chemistry > Plastics & polymers technology Books > Professional & Technical > Mechanical engineering & materials > Materials science > General
LSN:	0-08-100250-5
Barcode:	9780081002506

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