Bringing Scanning Probe Microscopy Up to Speed introduces the
principles of scanning probe systems with particular emphasis on
techniques for increasing speed. The authors include useful
information on the characteristics and limitations of current
state-of-the-art machines as well as the properties of the systems
that will follow in the future. The basic approach is two-fold.
First, fast scanning systems for single probes are treated and,
second, systems with multiple probes operating in parallel are
presented. The key components of the SPM are the mechanical
microcantilever with integrated tip and the systems used to measure
its deflection. In essence, the entire apparatus is devoted to
moving the tip over a surface with a well-controlled force. The
mechanical response of the actuator that governs the force is of
the utmost importance since it determines the scanning speed. The
mechanical response relates directly to the size of the actuator;
smaller is faster. Traditional scanning probe microscopes rely on
piezoelectric tubes of centimeter size to move the probe. In future
scanning probe systems, the large actuators will be replaced with
cantilevers where the actuators are integrated on the beam. These
will be combined in arrays of multiple cantilevers with MEMS as the
key technology for the fabrication process.
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