Introductory MEMS - Fabrication and Applications (Paperback, 2010 ed.)

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.

General

Imprint:	Springer-Verlag New York
Country of origin:	United States
Release date:	September 2014
First published:	2010
Authors:	Thomas M. Adams • Richard A. Layton
Dimensions:	235 x 155 x 24mm (L x W x T)
Format:	Paperback
Pages:	440
Edition:	2010 ed.
ISBN-13:	978-1-4899-8421-0
Categories:	Books > Science & Mathematics > Physics > Classical mechanics > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Circuits & components Books > Professional & Technical > Mechanical engineering & materials > Materials science > Mechanics of solids > General Promotions
LSN:	1-4899-8421-6
Barcode:	9781489984210

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