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Introductory MEMS - Fabrication and Applications (Paperback, 2010 ed.)
Loot Price: R2,417
Discovery Miles 24 170
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Introductory MEMS - Fabrication and Applications (Paperback, 2010 ed.)
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Introductory MEMS: Fabrication and Applications is a practical
introduction to MEMS for advanced undergraduate and graduate
students. Part I introduces the student to the most commonly used
MEMS fabrication techniques as well as the MEMS devices produced
using these techniques. Part II focuses on MEMS transducers:
principles of operation, modeling from first principles, and a
detailed look at commercialized MEMS devices, in addition to
microfluidics. Multiple field-tested laboratory exercises are
included, designed to facilitate student learning about the
fundamentals of microfabrication processes. References, suggested
reading, review questions, and homework problems are provided at
the close of each chapter. Introductory MEMS: Fabrication and
Applications is an excellent introduction to the subject, with a
tested pedagogical structure and an accessible writing style
suitable for students at an advanced undergraduate level across
academic disciplines.
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