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Books > Science & Mathematics > Chemistry > Analytical chemistry > Qualitative analytical chemistry > Chemical spectroscopy, spectrochemistry

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Rapid Thermal Processing of Semiconductors (Paperback, Softcover reprint of the original 1st ed. 1997) Loot Price: R6,486
Discovery Miles 64 860
Repayment Terms: R608 pm x 12*
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Rapid Thermal Processing of Semiconductors (Paperback, Softcover reprint of the original 1st ed. 1997): Victor E. Borisenko,...

Rapid Thermal Processing of Semiconductors (Paperback, Softcover reprint of the original 1st ed. 1997)

Victor E. Borisenko, Peter J. Hesketh

Series: Microdevices

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Loot Price R6,486 Discovery Miles 64 860 | Repayment Terms: R608 pm x 12*

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Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

General

Imprint: Springer-Verlag New York
Country of origin: United States
Series: Microdevices
Release date: June 2013
First published: 1997
Authors: Victor E. Borisenko • Peter J. Hesketh
Dimensions: 235 x 155 x 20mm (L x W x T)
Format: Paperback
Pages: 358
Edition: Softcover reprint of the original 1st ed. 1997
ISBN-13: 978-1-4899-1806-2
Categories: Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > General
Books > Science & Mathematics > Chemistry > Analytical chemistry > Qualitative analytical chemistry > Chemical spectroscopy, spectrochemistry > General
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LSN: 1-4899-1806-X
Barcode: 9781489918062

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