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Books > Science & Mathematics > Chemistry > Analytical chemistry > Qualitative analytical chemistry > Chemical spectroscopy, spectrochemistry

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Rapid Thermal Processing of Semiconductors (Paperback, Softcover reprint of the original 1st ed. 1997) Loot Price: R6,670

Discovery Miles 66 700

Repayment Terms: R625 pm x 12*

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Rapid Thermal Processing of Semiconductors (Paperback, Softcover reprint of the original 1st ed. 1997): Victor E. Borisenko,...

Rapid Thermal Processing of Semiconductors (Paperback, Softcover reprint of the original 1st ed. 1997)

Victor E. Borisenko, Peter J. Hesketh

Series: Microdevices

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Loot Price R6,670 Discovery Miles 66 700 | Repayment Terms: R625 pm x 12*

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Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

General

Imprint:	Springer-Verlag New York
Country of origin:	United States
Series:	Microdevices
Release date:	June 2013
First published:	1997
Authors:	Victor E. Borisenko • Peter J. Hesketh
Dimensions:	235 x 155 x 20mm (L x W x T)
Format:	Paperback
Pages:	358
Edition:	Softcover reprint of the original 1st ed. 1997
ISBN-13:	978-1-4899-1806-2
Categories:	Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > General Books > Science & Mathematics > Chemistry > Analytical chemistry > Qualitative analytical chemistry > Chemical spectroscopy, spectrochemistry > General Promotions
LSN:	1-4899-1806-X
Barcode:	9781489918062