Mikromechanik - Mikrofertigung mit Methoden der Halbleitertechnologie (German, Paperback, Softcover reprint of the original 1st ed. 1989)

Mikromechanik behandelt die physikalischen Grundlagen dieser jungen, zukunftstrachtigen Disziplin, ihre Technologie, aufbauend auf der Siliziumtechnologie, und ihre Nutzung in den verschiedensten Anwendungen der Bereiche Sensorik, Aktuatorik und integrierte Optoelektronik. Das Buch ist unentbehrlich fur jeden, der sich intensiv mit der Mikromechanik befassen will; fur den Studierenden ebenso wie fur den Ingenieur in der Praxis oder den interessierten Laien."

General

Imprint:	Springer-Verlag
Country of origin:	Germany
Release date:	March 2013
First published:	1989
Editors:	Anton Heuberger
Dimensions:	244 x 170 x 27mm (L x W x T)
Format:	Paperback
Pages:	501
Edition:	Softcover reprint of the original 1st ed. 1989
ISBN-13:	978-3-642-46622-9
Languages:	German
Categories:	Books > Professional & Technical > Technology: general issues > Engineering: general Books > Professional & Technical > Industrial chemistry & manufacturing technologies > General Books > Business & Economics > Industry & industrial studies > Manufacturing industries > General Books > Professional & Technical > Mechanical engineering & materials > Mechanical engineering > General Books > Professional & Technical > Mechanical engineering & materials > Materials science > General Books > Professional & Technical > Mechanical engineering & materials > Engineering skills & trades > General Books > Professional & Technical > Energy technology & engineering > Electrical engineering > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Automatic control engineering > Robotics
LSN:	3-642-46622-2
Barcode:	9783642466229

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