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Microtransducer CAD - Physical and Computational Aspects (Paperback, Softcover reprint of the original 1st ed. 1999)
Loot Price: R1,451
Discovery Miles 14 510
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Microtransducer CAD - Physical and Computational Aspects (Paperback, Softcover reprint of the original 1st ed. 1999)
Series: Computational Microelectronics
Expected to ship within 18 - 22 working days
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Computer-aided-design (CAD) of semiconductor microtransducers is
relatively new in contrast to their counterparts in the integrated
circuit world. Integrated silicon microtransducers are realized
using microfabrication techniques similar to those for standard
integrated circuits (ICs). Unlike IC devices, however,
microtransducers must interact with their environment, so their
numerical simulation is considerably more complex. While the design
of ICs aims at suppressing "parasitic effects, microtransducers
thrive on optimizing the one or the other such effect. The
challenging quest for physical models and simulation tools enabling
microtransducer CAD is the topic of this book. It is intended as a
text for graduate students in Electrical Engineering and Physics
and as a reference for CAD engineers in the microsystems industry.
This text evolved from a series of courses offered to graduate
students from Electrical Engineering and Physics. Much of the
material in the book can be presented in about 40 hours of lecture
time. The book starts with an illustrative example which highlights
the goals and benefits of microtransducer CAD. This follows with a
summary of model equations describing electrical transport in
semiconductor devices and microtransducers in the absence of
external fields. Models treating the effects of the external
radiant, magnetic, thermal, and mechanical fields on electrical
transport are then systematically introduced. To enable a smooth
transition into modeling of mechanical systems, an abridged version
of solid structural and fluid mechanics is presented, whereby the
focus is on pertinent model equations and boundary conditions. This
follows with model equations and boundary conditions relevant to
various types of mechanical microactuators including electrostatic,
thermal, magnetic, piezoelectric, and electroacoustic. The book
concludes with a glimpse into SPICE simulation of the mixed-signal
microsystem, i.e., microtransducer plus circuitry. Where possible,
the model equations are supplemented with tables and/or graphs of
process-dependent material data to enable the CAD engineer to carry
out simulations even when reliable material models are not
available. IVZ LANG: Introduction: Modeling and Simulation of
Microtransducers; Illustrative Example; Progress in Microtransducer
Modeling; References.- Basic Electronic Transport: Poisson s
Equation; Continuity Equations; Carrier Transport in Crystalline
Materials and Isothermal Behavior; Electrical Conductivity and
Isothermal Behavior in Polycrystalline Materials; Electrical
Conductivity and Isothermal Behavior in Metals; Boundary and
Interface Conditions; The External Fields What Do They Influence?;
References.- Radiation Effects on Carrier Transport: Reflection and
Transmission of Optical Signals; Modeling Optical Absorption in
Intrinsic Semiconductors; Absorption in Heavily-Doped
Semiconductors; Optical Generation Rate and Quantum Efficiency; Low
Energy Interactions with Insulators and Metals; High Energy
Interactions and Monte Carlo Simulations; Model Equations for
Radiant Sensor Simulation; Illustrative Simulation Example Color
Sensor; References.- Magnetic-Field Effects on Carrier Transport:
Galvanomagnetic Transport Equation; Galvanomagnetic Transport
Coefficients; Equations and Boundary Conditions for Magnetic Sensor
Simulation; Illustrative Simulation Example Micromachined Magnetic
Vector Probe; References.- Thermal Non-Uniformity Effects on
Carrier Transport: Non-Isothermal Effects; Electrothermal Transport
Model; Electrical and Thermal Transport Coefficients;
Electro-Thermo-Magnetic Interactions; Heat Transfer in Thermal
Microstructures; Summary of Equations and Computational Procedure;
Illustrative Simulation Example Micro Pirani Gauge; References.-
Mechanical Effects on Carrier Transport: Piezoresistive Effect;
Strain and Electron Transport; Strain and Hole Transport;
Piezojunction Effect; Effects of Stress Gradients;
Galvano-Piezo-Magnetic Effects; The Piezo Drift-Diffusion Transport
Model; Illustrative Simulation Example Stress Effects on Hall
Sensors; References.- Mechanical and Fluidic Signals: Definitions;
Model Equations for Mechanical Analysis; Model Equations for
Analysis of Fluid Transport; Illustrative Simulation Example
Analysis of Flow Channels; References.- Micro-Actuation:
Transduction Principles; State-of-the-Art and Preview;
Electrostatic Actuation; Thermal Actuation; Magnetic Actuation;
Piezoelectric Actuation; Electroacoustic Transducers; Computational
Procedure and Coupling; Illustrative Example CMOS Micromirror.-
Microsystem Simulation: Electrical Analogues for Mixed-Signals and
Historical Developments; Circuit Modeling and Implementation
Considerations; Lumped Analysis: Illustrative Example Electrostatic
Micromirror; Distributed Analysis: Illustrative Example Flow
Microsensor; References.- Subject Index."
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