This book covers the state-of-the-art technologies for positioning
with nanometer resolutions and accuracies, particularly those based
on piezoelectric actuators and MEMS actuators. The latest advances
are described, including the design of nanopositioning devices,
sensing and actuation technologies and control methods for
nanopositioning. This is an ideal book for mechanical and
electrical engineering students and researchers; micro and
nanotechnology researchers and graduate students; as well as those
working in the precision instrumentation or semiconductor
industries.
General
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