Nanopositioning Technologies - Fundamentals and Applications (Paperback, Softcover reprint of the original 1st ed. 2016)

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

General

Imprint:	Springer International Publishing AG
Country of origin:	Switzerland
Release date:	March 2018
First published:	2016
Editors:	Changhai Ru • Xinyu Liu • Yu Sun
Dimensions:	235 x 155 x 22mm (L x W x T)
Format:	Paperback
Pages:	409
Edition:	Softcover reprint of the original 1st ed. 2016
ISBN-13:	978-3-319-79539-3
Categories:	Books > Arts & Architecture > Industrial / commercial art & design > Product design Books > Professional & Technical > Technology: general issues > Engineering: general Books > Professional & Technical > Technology: general issues > Nanotechnology Books > Professional & Technical > Technology: general issues > Technical design > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Automatic control engineering > General
LSN:	3-319-79539-2
Barcode:	9783319795393

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