Defect Recognition and Image Processing in Semiconductors 1997 - Proceedings of the seventh conference on Defect Recognition and Image Processing, Berlin, September 1997 (Hardcover, 1997)

Defect Recognition and Image Processing in Semiconductors 1997 provides a valuable overview of current techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This volume addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. The book discusses the merits and limits of characterization techniques; standardization; correlations between defects and device performance, including degradation and failure analysis; and the adaptation and application of standard characterization techniques to new materials. It also examines the impressive advances made possible by the increase in the number of nanoscale scanning techniques now available. The book investigates defects in layers and devices, and examines the problems that have arisen in characterizing gallium nitride and silicon carbide.

General

Imprint:	Institute Of Physics Publishing
Country of origin:	United Kingdom
Series:	Institute of Physics Conference Series
Release date:	1998
First published:	1998
Authors:	J. Doneker
Dimensions:	234 x 156 x 30mm (L x W x T)
Format:	Hardcover
Pages:	524
Edition:	1997
ISBN-13:	978-0-7503-0500-6
Categories:	Books > Science & Mathematics > Physics > States of matter > Condensed matter physics (liquids & solids) Books > Professional & Technical > Mechanical engineering & materials > Materials science > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > Semi-conductors & super-conductors
LSN:	0-7503-0500-2
Barcode:	9780750305006

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