Plasma Nanoscience (Hardcover)

Filling the need for a single work specifically addressing how to use plasma for the fabrication of nanoscale structures, this book is the first to cover plasma deposition in sufficient depth.
The author has worked with numerous R&D institutions around the world, and here he begins with an introductory overview of plasma processing at micro- and nanoscales, as well as the current problems and challenges, before going on to address surface preparation, generation and diagnostics, transport and the manipulation of nano units.

General

Imprint:	Wiley-VCH Verlag GmbH
Country of origin:	Germany
Release date:	August 2008
First published:	October 2008
Authors:	K Ostrikov
Dimensions:	247 x 181 x 34mm (L x W x T)
Format:	Hardcover
Pages:	563
ISBN-13:	978-3-527-40740-8
Categories:	Books > Professional & Technical > Technology: general issues > Nanotechnology Books > Professional & Technical > Mechanical engineering & materials > General Books > Science & Mathematics > Physics > States of matter > Plasma physics
LSN:	3-527-40740-5
Barcode:	9783527407408

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