Mechanical Microsensors (Paperback, Softcover reprint of hardcover 1st ed. 2001)

This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente)."

General

Imprint:	Springer-Verlag
Country of origin:	Germany
Series:	Microtechnology and MEMS
Release date:	December 2010
First published:	2001
Authors:	M. Elwenspoek • R. Wiegerink
Dimensions:	235 x 155 x 16mm (L x W x T)
Format:	Paperback
Pages:	295
Edition:	Softcover reprint of hardcover 1st ed. 2001
ISBN-13:	978-3-642-08706-6
Categories:	Books > Science & Mathematics > Science: general issues > Scientific standards Books > Professional & Technical > Technology: general issues > Nanotechnology Books > Professional & Technical > Mechanical engineering & materials > Materials science > Mechanics of solids > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Automatic control engineering > General
LSN:	3-642-08706-X
Barcode:	9783642087066

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