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Electron-Beam Interactions with Solids - Application of the Monte Carlo Method to Electron Scattering Problems (Paperback, Softcover reprint of the original 1st ed. 2003)
Loot Price: R4,431
Discovery Miles 44 310
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Electron-Beam Interactions with Solids - Application of the Monte Carlo Method to Electron Scattering Problems (Paperback, Softcover reprint of the original 1st ed. 2003)
Series: Springer Tracts in Modern Physics, 186
Expected to ship within 10 - 15 working days
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The interaction of an electron beam with a solid target has been
studied since the early part of the past century. Since 1960, the
electron-solid interaction
hasbecomethesubjectofanumberofinvestigators'workowingtoitsfun-
mental role in scanning electron microscopy, in electron-probe
microanalysis, in Auger electron spectroscopy, in electron-beam
lithography and in radiation damage. The interaction of an electron
beam with a solid target has often been investigated theoretically
by using the Monte Carlo method, a nume- cal procedure involving
random numbers that is able to solve mathematical problems. This
method is very useful for the study of electron penetration in
matter. The probabilistic laws of the interaction of an individual
electron with the atoms constituting the target are well known.
Consequently, it is possible to compute the macroscopic
characteristics of interaction processes by simulating a large
number of real trajectories, and then averaging them. The aim of
this book is to study the probabilistic laws of the interaction of
individual electrons with atoms (elastic and inelastic
cross-sections); to - vestigate selected aspects of electron
interaction with matter (backscattering coe?cients for bulk
targets, absorption, backscattering and transmission for both
supported and unsupported thin ?lms, implantation pro?les, seconda-
electron emission, and so on); and to introduce the Monte Carlo
method and its applications to compute the macroscopic
characteristics of the inter- tion processes mentioned above. The
book compares theory, computational simulations and experimental
data in order to o?er a more global vision.
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