This book describes the developmental history of the vacuum system
of the transmission electron microscope (TEM) at the Japan Electron
Optics Laboratory (JEOL) from its inception to its use in today's
high-technology microscopes. The author and his colleagues were
engaged in developing vacuum technology for electron microscopes
(JEM series) at JEOL for many years. This volume presents a summary
and explanation of their work and the technology that makes
possible a clean ultrahigh vacuum. The typical users of the TEM are
top-level researchers working at the frontiers of new materials or
with new biological specimens. They often use the TEM under
extremely severe conditions, with problems sometimes occurring in
the vacuum system of the microscopes. JEOL engineers then must work
as quickly as possible to improve the vacuum evacuation system so
as to prevent the recurrence of such problems. Among the wealth of
explanatory material in this book are examples of users' reports of
problems in the vacuum system of the JEM, such as the occurrence of
a micro-discharge and the back-streaming of the diffusion pump (DP)
oil vapor. This work is a valuable resource for researchers who use
the transmission electron microscope and for engineers and
scientists interested in its technology.
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