This reference book concentrates on microstructuring surfaces of
optical materials with directed fluxes of off-electrode plasma
generated by high-voltage gas discharge and developing methods and
equipment related to this technique. It covers theoretical and
experimental studies on the electrical and physical properties of
high-voltage gas discharges used to generate plasma outside an
electrode gap. A new class of methods and devices that makes it
possible to implement a series of processes for fabricating
diffraction microstructures on large format wafers is also
discussed.
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