Plasma-Surface Interactions and Processing of Materials (Hardcover, 1990 ed.)

An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.

General

Imprint:	Springer
Country of origin:	Netherlands
Series:	NATO Science Series E:, 176
Release date:	1990
First published:	1990
Editors:	O. Auciello • Alberto Gras-Marti • Jose Antonio Valles-Abarca • Daniel L. Flamm
Dimensions:	234 x 156 x 31mm (L x W x T)
Format:	Hardcover
Pages:	558
Edition:	1990 ed.
ISBN-13:	978-0-7923-0584-2
Categories:	Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Industrial chemistry > General Promotions
LSN:	0-7923-0584-1
Barcode:	9780792305842

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