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Plasma Processing of Semiconductors (Paperback, Softcover reprint of the original 1st ed. 1997) Loot Price: R8,172
Discovery Miles 81 720
Repayment Terms: R766 pm x 12*
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Plasma Processing of Semiconductors (Paperback, Softcover reprint of the original 1st ed. 1997): P.F. Williams

Plasma Processing of Semiconductors (Paperback, Softcover reprint of the original 1st ed. 1997)

P.F. Williams

Series: NATO Science Series E:, 336

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Loot Price R8,172 Discovery Miles 81 720 | Repayment Terms: R766 pm x 12*

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Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

General

Imprint: Springer
Country of origin: Netherlands
Series: NATO Science Series E:, 336
Release date: October 2012
First published: 1997
Editors: P.F. Williams
Dimensions: 240 x 160 x 32mm (L x W x T)
Format: Paperback
Pages: 613
Edition: Softcover reprint of the original 1st ed. 1997
ISBN-13: 978-9401064866
Categories: Books > Science & Mathematics > Physics > Atomic & molecular physics
Books > Professional & Technical > Mechanical engineering & materials > Production engineering > General
Books > Professional & Technical > Energy technology & engineering > Electrical engineering > General
Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > General
LSN: 9401064865
Barcode: 9789401064866

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