Plasma Processing of Semiconductors (Paperback, Softcover reprint of the original 1st ed. 1997)

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

General

Imprint:	Springer
Country of origin:	Netherlands
Series:	NATO Science Series E:, 336
Release date:	October 2012
First published:	1997
Editors:	P.F. Williams
Dimensions:	240 x 160 x 32mm (L x W x T)
Format:	Paperback
Pages:	613
Edition:	Softcover reprint of the original 1st ed. 1997
ISBN-13:	978-9401064866
Categories:	Books > Science & Mathematics > Physics > Atomic & molecular physics Books > Professional & Technical > Mechanical engineering & materials > Production engineering > General Books > Professional & Technical > Energy technology & engineering > Electrical engineering > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > General
LSN:	9401064865
Barcode:	9789401064866

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