|
Books > Professional & Technical > Industrial chemistry & manufacturing technologies > Other manufacturing technologies > Precision instruments manufacture
|
Buy Now
Poly-SiGe for MEMS-above-CMOS Sensors (Paperback, Softcover reprint of the original 1st ed. 2014)
Loot Price: R3,176
Discovery Miles 31 760
|
|
|
Poly-SiGe for MEMS-above-CMOS Sensors (Paperback, Softcover reprint of the original 1st ed. 2014)
Series: Springer Series in Advanced Microelectronics, 44
Expected to ship within 18 - 22 working days
|
Polycrystalline SiGe has emerged as a promising MEMS
(Microelectromechanical Systems) structural material since it
provides the desired mechanical properties at lower temperatures
compared to poly-Si, allowing the direct post-processing on top of
CMOS. This CMOS-MEMS monolithic integration can lead to more
compact MEMS with improved performance. The potential of poly-SiGe
for MEMS above-aluminum-backend CMOS integration has already been
demonstrated. However, aggressive interconnect scaling has led to
the replacement of the traditional aluminum metallization by copper
(Cu) metallization, due to its lower resistivity and improved
reliability. Poly-SiGe for MEMS-above-CMOS sensors demonstrates the
compatibility of poly-SiGe with post-processing above the advanced
CMOS technology nodes through the successful fabrication of an
integrated poly-SiGe piezoresistive pressure sensor, directly
fabricated above 0.13 m Cu-backend CMOS. Furthermore, this book
presents the first detailed investigation on the influence of
deposition conditions, germanium content and doping concentration
on the electrical and piezoresistive properties of boron-doped
poly-SiGe. The development of a CMOS-compatible process flow, with
special attention to the sealing method, is also described.
Piezoresistive pressure sensors with different areas and
piezoresistor designs were fabricated and tested. Together with the
piezoresistive pressure sensors, also functional capacitive
pressure sensors were successfully fabricated on the same wafer,
proving the versatility of poly-SiGe for MEMS sensor applications.
Finally, a detailed analysis of the MEMS processing impact on the
underlying CMOS circuit is also presented.
General
Is the information for this product incomplete, wrong or inappropriate?
Let us know about it.
Does this product have an incorrect or missing image?
Send us a new image.
Is this product missing categories?
Add more categories.
Review This Product
No reviews yet - be the first to create one!
|
You might also like..
|
Email address subscribed successfully.
A activation email has been sent to you.
Please click the link in that email to activate your subscription.
Welcome to Loot.co.za!
Sign in / Register |Wishlists & Gift Vouchers |Help | Advanced search
