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Books > Professional & Technical > Mechanical engineering & materials > Materials science

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Ultraclean Surface Processing of Silicon Wafers - Secrets of VLSI Manufacturing (Paperback, Softcover reprint of hardcover 1st ed. 1998) Loot Price: R8,384

Discovery Miles 83 840

Repayment Terms: R786 pm x 12*

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Ultraclean Surface Processing of Silicon Wafers - Secrets of VLSI Manufacturing (Paperback, Softcover reprint of hardcover 1st...

Ultraclean Surface Processing of Silicon Wafers - Secrets of VLSI Manufacturing (Paperback, Softcover reprint of hardcover 1st ed. 1998)

Takeshi Hattori; Translated by T. Hattori, S. Heusler, J.P. Webb

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Loot Price R8,384 Discovery Miles 83 840 | Repayment Terms: R786 pm x 12*

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A totally new concept for clean surface processing of Si wafers is introduced in this book. Some fifty distinguished researchers and engineers from the leading Japanese semiconductor companies, such as NEC, Hitachi, Toshiba, Sony and Panasonic as well as from several universities reveal to us for the first time the secrets of these highly productive institutions. They describe the techniques and equipment necessary for the preparation of clean high-quality semiconductor surfaces as a first step in high-yield/high-quality device production. This book thus opens the door to the manufacturing of reliable nanoscale devices and will be extremely useful for every engineer, physicist and technician involved in the production of silicon semiconductor devices.

General

Imprint:	Springer-Verlag
Country of origin:	Germany
Release date:	December 2010
First published:	1998
Editors:	Takeshi Hattori
Translators:	T. Hattori • S. Heusler • J.P. Webb
Dimensions:	235 x 155 x 36mm (L x W x T)
Format:	Paperback
Pages:	616
Edition:	Softcover reprint of hardcover 1st ed. 1998
ISBN-13:	978-3-642-08272-6
Categories:	Books > Science & Mathematics > Physics > States of matter > General Books > Professional & Technical > Mechanical engineering & materials > Materials science > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > General Promotions
LSN:	3-642-08272-6
Barcode:	9783642082726