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Books > Professional & Technical > Mechanical engineering & materials > Materials science
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Ultraclean Surface Processing of Silicon Wafers - Secrets of VLSI Manufacturing (Paperback, Softcover reprint of hardcover 1st ed. 1998)
Loot Price: R7,729
Discovery Miles 77 290
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Ultraclean Surface Processing of Silicon Wafers - Secrets of VLSI Manufacturing (Paperback, Softcover reprint of hardcover 1st ed. 1998)
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A totally new concept for clean surface processing of Si wafers is
introduced in this book. Some fifty distinguished researchers and
engineers from the leading Japanese semiconductor companies, such
as NEC, Hitachi, Toshiba, Sony and Panasonic as well as from
several universities reveal to us for the first time the secrets of
these highly productive institutions. They describe the techniques
and equipment necessary for the preparation of clean high-quality
semiconductor surfaces as a first step in high-yield/high-quality
device production. This book thus opens the door to the
manufacturing of reliable nanoscale devices and will be extremely
useful for every engineer, physicist and technician involved in the
production of silicon semiconductor devices.
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