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Books > Professional & Technical > Energy technology & engineering > Electrical engineering
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Advanced MEMS/NEMS Fabrication and Sensors (Hardcover, 1st ed. 2022)
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Advanced MEMS/NEMS Fabrication and Sensors (Hardcover, 1st ed. 2022)
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This book begins by introducing new and unique fabrication,
micromachining, and integration manufacturing methods for MEMS
(Micro-Electro-Mechanical Systems) and NEMS
(Nano-Electro-Mechanical Systems) devices, as well as novel
nanomaterials for sensor fabrications. The second section focuses
on novel sensors based on these emerging MEMS/NEMS fabrication
methods, and their related applications in industrial, biomedical,
and environmental monitoring fields, which makes up the sensing
layer (or perception layer) in IoT architecture. This authoritative
guide offers graduate students, postgraduates, researchers, and
practicing engineers with state-of-the-art processes and
cutting-edge technologies on MEMS /NEMS, micro- and nanomachining,
and microsensors, addressing progress in the field and prospects
for future development. Presents latest international research on
MEMS/NEMS fabrication technologies and novel micro/nano sensors;
Covers a broad spectrum of sensor applications; Written by leading
experts in the field.
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